Xiamen Changelight Adds MOCVD Capacity with Veeco TurboDisc K475i Technology


Veeco Instruments Inc. announced today that Changelight Co., Ltd. has ordered additional TurboDisc K475i Arsenic Phosphide (As/P) Metal Organic Chemical Vapor Deposition (MOCVD) system capability to increase production of red, orange, yellow (R/O/Y) light emitting diodes (LEDs). Changelight qualified and put into production Veeco’s premiere K475i system in February 2016.

“Our first K475i system has exceeded our expectations in terms of lowering manufacturing costs, driving exceptional uniformity and producing unmatched yield and brightness,” said Shuangxiang Zhang, General Manager of Yangzhou Changelight Co., Ltd. “Adding this capability will enable us to meet existing demand for red, orange and yellow LEDs, as well as position ourselves to capitalize on the emerging As/P photonics market.”

Introduced in February 2016, the K475i system incorporates proprietary TurboDisc and Uniform FlowFlange MOCVD technologies and enables Veeco customers to reduce LED cost per wafer by up to 20 percent compared to alternative systems through higher productivity, best-in-class yields and reduced operating expenses.

“Changelight’s quick adoption of Veeco’s K475i technology is a testament of its production-proven functionality,” said William J. Miller, Ph.D., President, Veeco. “Changelight will benefit from superior uniformity and repeatability lowering their cost of ownership.”

Veeco’s proprietary Uniform FlowFlange technology produces films with very high uniformity and improved within-wafer and wafer-to-wafer repeatability resulting in the industry’s lowest cost of ownership. This patented technology provides ease-of-tuning for fast process optimization and fast tool recovery time after maintenance enabling the highest productivity for applications such as lighting, display, solar, edge-emitter laser diodes, vertical cavity surface emitting lasers (VCSELs) and heterojunction bipolar transistors (HBTs).

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